| 摘要 |
PROBLEM TO BE SOLVED: To provide a system with an FIB tube and a SEM tube, wherein influence of a secondary electron excited by an FIB does not come out as noise in a SEM image, when performing SEM observation of FIB processing on a real time basis. SOLUTION: In this method for removing image noise in an FIB/SEM composite device, the scan period of an SEM2 is synchronized with that of an FIB1 so that a secondary electron detecting signal in an FIB blanking period have no influence on the picture element of the SEM image, and an SEM current is optimized in regard to a used FIB current to reduce influence of the superposed secondary electron excited by the FIB on the SEM image. COPYRIGHT: (C)2005,JPO&NCIPI
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