STUCK SUBSTRATE MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and a method for manufacturing a stuck substrate by which manufacture defects of the stuck substrate can be reduced. SOLUTION: A substrate W2 is carried in a chamber 20 of a press device by a conveying robot 31 which suctionally holds its outer peripheral part of an internal surface of the substrate W2 while jetting gas toward the internal surface of the substrate W2, and held by a pressing plate 24a. COPYRIGHT: (C)2005,JPO&NCIPI