| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus in which an occupying area is reduced. SOLUTION: The substrate processing apparatus is constituted by accumulating a unit for the substrate processing apparatus as a unit for constituting the substrate processing apparatus (cell). The apparatus has a treatment part for performing a predetermined treatment to the substrate, and a substrate conveyance means for performing delivery of the substrate at this treatment part on multiple steps. For example, since a cell 15A is accumulated on the cell 12, and a cell 15B is accumulated and constituted on a cell 13, the occupying area of the substrate processing apparatus can be reduced, and the footprint saving of the substrate processing apparatus can be performed. COPYRIGHT: (C)2005,JPO&NCIPI
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