| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide carrying/supporting methods of a catalyst for a fuel cell which are advantageous to the improvement in power generation output, suppressing giving damages to an electrolytic film. <P>SOLUTION: In the carrying/supporting methods, a sputtering system 100 is used wherein the system includes a chamber 104 having a decompression chamber 101, a target holder 102 and an object holder 103, a superconducting magnet 105 provided at the rear side of the target holder 102, and a freezer 108 which cools the superconductive magnet 105 to cryogenic temperatures. The electrolyte of the fuel cell is installed at the object holder 103 of the sputtering system 100. A target 109, which uses a catalytic metal as a base material, is installed at the target holder 102. A high-density plasma is formed near the target and discharged by a magnetic field of the superconducting magnet 105, in a state where gas is introduced to the decompression chamber 101, then a catalyst is carried and supported by the electrolyte, after flying atoms or clusters of the catalytic metal. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
