发明名称 Method for manufacturing a component, in particular a thermal sensor, and thermal sensor
摘要 A method of manufacturing a component, in particular a thermal sensor, and a thermal sensor. The component has at least two regions having different heat conductivities, a surface region being created in a substrate and the heat conductivity of the surface region being lower than that of the surrounding substrate. For producing a flat topography on the component a layer is created which covers the surface region. The layer and the surface region have at least approximately similar physical properties.
申请公布号 US6933166(B2) 申请公布日期 2005.08.23
申请号 US20030422320 申请日期 2003.04.23
申请人 ROBERT BOSCH GMBH 发明人 PANNEK THORSTEN
分类号 G01F1/684;G01K13/00;(IPC1-7):H01L21/00 主分类号 G01F1/684
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