| 摘要 |
PROBLEM TO BE SOLVED: To provide a light-intensity uniformizing mechanism, enabling modification of an irradiation area in a simple configuration by minimizing the exposure irradiation time (improvement in condensing rate), without damaging the uniformity of irradiation distribution and minimizing the scattering of wasteful light, except to the irradiation area. SOLUTION: The light-intensity uniforming mechanism is arranged in an optical path of light from a light source part, having a discharge lamp and a curved face reflection mirror, and uniformizes the irradiation distribution of light irradiated from the light source part. The light intensity uniformizing mechanism 6 comprises a first lens group 6A, arranging a plurality of convex lenses 6a on the same plane, a second lens group 6B arranging a plurality of convex lenses 6b on the same plane by being arranged, facing the first lens group to space by a prescribed distance, and a third lens group 6C installed, facing to both the lens groups at a position between the second lens group and the first lens group or provided retractably via a moving means 7 and arranging a plurality of concave lenses 6c on the same plane. COPYRIGHT: (C)2005,JPO&NCIPI
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