| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a decontamination apparatus that can adjust interior humidity even at the time when a decontamination gas is supplied, and does not waste the decontamination gas. <P>SOLUTION: When a hydrogen peroxide gas is supplied to an isolator 2 as a decontamination gas, dehumidified unsaturated air is also supplied through an unsaturated air guide route 55. The unsaturated air is generated by generating compressed air by a compressor 51 and dehumidifying the compressed air by a dehumidifier 56. Furthermore, the quantity of the hydrogen peroxide gas and/or unsaturated air supplied is changed to ensure that a condensate layer of a high concentration is stably formed on the basis of humidity measured by a hygro thermo meter 82 provided in the isolator 2. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
