发明名称 |
Method for making a magnetoresistive sensor having a cobalt-ferrite pinning layer |
摘要 |
An exchange-coupled magnetic structure of a cobalt-ferrite layer adjacent a magnetic metal layer is used in magnetorestive sensors, such as spin valves or tunnel junction valves. The exchange-coupled magnetic structure is used in a pinning structure pinning the magnetization of a ferromagnetic pinned layer, or in an AP pinned layer. A low coercivity ferrite may be used in an AP free layer. Cobalt-ferrite layers may be formed by co-sputtering of Co and Fe in an oxygen/argon gas mixture, or by sputtering of a CoFe<SUB>2 </SUB>composition target in an oxygen/argon gas mixture. Alternatively, the cobalt-ferrite layer may be formed by evaporation of Co and Fe from an alloy source or separate sources along with a flux of oxygen atoms from a RF oxygen atom beam source. Magnetoresistive sensors including cobalt-ferrite layers have small read gaps and produce large signals with high efficiency.
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申请公布号 |
US6928723(B2) |
申请公布日期 |
2005.08.16 |
申请号 |
US20030746021 |
申请日期 |
2003.12.23 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CAREY MATTHEW JOSEPH;DO HOA VAN;FARROW ROBIN FREDERICK CHARLES;GURNEY BRUCE ALVIN;MARGULIES DAVID THOMAS;MARKS RONALD FRANKLIN;RICE PHILIP MILTON;XU REN |
分类号 |
G01R33/09;G11B5/012;G11B5/39;H01F10/32;H01F41/30;(IPC1-7):G11B5/127;H04R31/00 |
主分类号 |
G01R33/09 |
代理机构 |
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