| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a contaminant removing apparatus which permits the effective utilization of a heat source and is capable of suppressing the propagation of bacteria in a spray chamber. <P>SOLUTION: An air washer 50 introduces air to be treated from a clean room. Cold water (E) supplied at a low temperature passes through a dehumidifying coil 63 and a spray water heat exchanger 59b, and flows into a cooling coil 68 for cooling the air to be treated. The cold water is thus warmed up and returns to a cold water producing means (H). Because the difference between inflow temperature and outflow temperature of the cold water is large and the diameter of a pipe of the cold water can be made small, the cost can be reduced. In addition, hot water supplied to a heating coil is not utilized for heating the cold water, and hence the effective utilization of a heat source is attained. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
