发明名称 Semiconductor device having a dummy pattern
摘要 A semiconductor device includes a substrate, a circuit pattern formed on the substrate, and a plurality of dummy patterns formed on the substrate in addition to the circuit pattern, wherein the plurality of dummy patterns include a plurality of marker dummy patterns in an array thereof, the marker dummy patterns being distinguishable from other dummy patterns and are distributed irregularly in the array of the dummy patterns.
申请公布号 US2005173802(A1) 申请公布日期 2005.08.11
申请号 US20050062489 申请日期 2005.02.23
申请人 FUJITSU LIMITED 发明人 TABARA KATSUJI;MAKINO SEIJI;ITO TAKAHISA
分类号 H01L23/544;(IPC1-7):H01L23/48 主分类号 H01L23/544
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