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发明名称
HEATER MODULE OF RAPID THERMAL PROCESSING APPARATUS
摘要
申请公布号
EP1559135(A1)
申请公布日期
2005.08.03
申请号
EP20030741598
申请日期
2003.07.21
申请人
KORNIC SYSTEMS CORP.
发明人
NAM, WON-SIK
分类号
H01L21/00;H01L21/324;H05B3/00;(IPC1-7):H01L21/324
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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