| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus that can converge a laser beam for machining a workpiece on a position separated as little as possible from a prescribed position. <P>SOLUTION: This laser beam machining apparatus emits a machining laser beam, with a condensing point focused inside a workpiece, turning out a reformed area by multi-photon absorption inside the workpiece along its intended cutting line. The apparatus is equipped with an objective lens unit 5 including a machining objective lens 42 which coaxially converges the machining laser beam and a range-finding laser beam for measuring displacement of the main face of the workpiece, a light receiving section 45 which receives reflected light in the main face of the range-finding laser beam, and an actuator 43 which holds the machining objective lens 42 freely movably back and forth relative to the main face on the basis of the reflected light received, and is also equipped with a casing 21 mounted with a laser unit for emitting the machining laser beam. The objective lens unit 5 is installed attachably and detachably relative to the casing 21. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
