发明名称 |
Efficient adaptive feedforward periodic disturbance compensation |
摘要 |
A system and method is given for minimizing periodic disturbances in electronic systems. Given the input-output characteristics of the system, the present method identifies and cancels the periodic disturbance. The periodic disturbance parameters are identified through the use of a residual generator. The output of the residual generator is fed into an identifier that estimates disturbance parameters. The compensation filter combines the output of the identifier with a set of pre-computed parameters to form a cancellation signal. This signal is then added to the input of the plant to cancel the periodic disturbance.
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申请公布号 |
US6922596(B2) |
申请公布日期 |
2005.07.26 |
申请号 |
US20030638244 |
申请日期 |
2003.08.07 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
ERICKSON MARK A.;GALARZA CECILIA;HERNANDEZ DAN;SHAH SUNIL C. |
分类号 |
G05B5/01;G05B13/04;G05B21/02;(IPC1-7):G05B13/02 |
主分类号 |
G05B5/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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