| 发明名称 |
SUBSTRATE SUPPORTING MEMBER, DEPOSITION APPARATUS HAVING THE MEMBER AND METHOD OF TRANSFERRING SUBSTRATE USING THE SAME |
| 摘要 |
An apparatus includes: a process chamber for treating a substrate; a susceptor in the process chamber; a supporting frame over the susceptor; and at least one wire connected to the supporting frame. |
| 申请公布号 |
KR20050076609(A) |
申请公布日期 |
2005.07.26 |
| 申请号 |
KR20050001505 |
申请日期 |
2005.01.07 |
| 申请人 |
JUSUNG ENGINEERING CO., LTD. |
发明人 |
HWANG, CHUL JU;LEE, SANG DO |
| 分类号 |
G02F1/13 |
主分类号 |
G02F1/13 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
