| 发明名称 |
Substrate supporting means having wire and apparatus using the same |
| 摘要 |
An apparatus includes: a process chamber for treating a substrate; a susceptor in the process chamber; a supporting frame over the susceptor; and at least one wire connected to the supporting frame.
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| 申请公布号 |
US2005155557(A1) |
申请公布日期 |
2005.07.21 |
| 申请号 |
US20050039505 |
申请日期 |
2005.01.19 |
| 申请人 |
HWANG CHUL-JOO;LEE SANG-DO |
发明人 |
HWANG CHUL-JOO;LEE SANG-DO |
| 分类号 |
C23C16/00;C23C16/458;G02F1/133;H01L21/677;H01L21/687;(IPC1-7):C23C16/00 |
主分类号 |
C23C16/00 |
| 代理机构 |
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代理人 |
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