| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device and its evaluation method for defect evaluation capable of easily determining the address of a cell and easily reaching / specifying a defective cell in a short time. SOLUTION: The semiconductor device is provided with a cell array in which a plurality of cells loaded with a circuit for characteristic evaluation are arrayed in a matrix shape in x and y directions on a semiconductor substrate, and the respective cells 10 are provided with symbols 11-16 indicating the respective addresses. In this case, it is preferable that the symbols are point symbols or bar-shaped symbols. Thus, the address of the cell is easily determined, units are not erroneously counted until reaching the defective cell, and the defective cell is easily reached and specified in a short time. COPYRIGHT: (C)2005,JPO&NCIPI
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