| 摘要 |
PROBLEM TO BE SOLVED: To extend a movable range of a moving part without applying high voltage or damaging miniaturization, to reduce power consumption, and to simplify a control circuit or the like. SOLUTION: A moving plate 21 is fixed to a substrate 11 via flexure sections 27a and 27b, and is movable vertically to the substrate 11. A fixed electrode also works as the substrate 11. The moving plate 21 comprises second electrode sections 23a and 23b capable of generating electrostatic force between it and the substrate 11 due to voltage between it and the substrate 11, and a current route 25 that is disposed in a magnetic field and generates Lorentz force by conduction. The moving plate 21 is provided with a mirror 12 moving into or out of an optical path. A control section controls current flowing in the current route 25 while always applying a predetermined voltage to a gap between the substrate 11 and the electrode sections 23a and 23b regardless of the position of the moving plate 21. COPYRIGHT: (C)2004,JPO |
