| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical member inspection device having handleability, capable of discovering flaws, defects or the like of a small-diameter member having a small diameter and a small radius of curvature, easily by one-time focusing. SOLUTION: An inspection stand 2 of this optical member inspection device 1 is equipped with a first stage 21, having an X-table 27 and a second stage 22, having a Y-table 29 moving forward and backward or in the right and left directions, a third stage 23 having a rotating table 31 arranged in mat coincidence with the observation optical axis of an objective lens 41a and rotating about axis in the vertical direction, a fifth stage 25 having a curvedly moving table 36 for changing inclination, by moving slidingly on a concavely curved part 35a formed so that the dimension of its radius, whose rotation center is arranged on the observation optical axis is equal to a prescribed dimension, and a fourth stage 24 having a Z-table 34 moving in the vertical direction. COPYRIGHT: (C)2005,JPO&NCIPI
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