| 摘要 |
PROBLEM TO BE SOLVED: To provide a profile measurement apparatus capable of measuring the height of the crest of a special shape article having the profile of a plurality of continuous chevron at the prescribed position without manual operation quickly and precisely. SOLUTION: The profile measuring apparatus for measuring the height of the crest of the special shape article having the plurality of continuous chevrons at the prescribed position comprises: an imaging means 20 for imaging the special shape article; an irradiation means 30 for irradiating the special shape article; a holding means for holding the special shape article with a specific tilt angle to the imaging means; and an operation means for computing the height of the crest at the prescribed position. The holding means holds the article at a tilt angle so as to project the measuring position on the imaging position to be imaged by the imaging means. The operation means computes the height of the crest at the measuring position based on the projection size of the measuring position obtained by the image at the measuring position, the known size on the special shape article regarding the measuring position, and the tilt angle. COPYRIGHT: (C)2005,JPO&NCIPI
|
