| 摘要 |
PROBLEM TO BE SOLVED: To conduct fringe scan measurement while removing an unnecessary fringe, even when grid pitches are set coarse, by providing the first moving stage for changing the phase difference between a projection grid and a reference grid for observation, and the second moving stage for integrally moving the both grids, with respect to the optical axis. SOLUTION: In the first moving stage 50, a movable plate 51 supporting the projection grid 40 is moved with respect to a support plate 53, to relatively the projection grid 40 make move with respect to the reference grid 46 for the observation. In the second moving stage 60, a movable plate 61 for supporting the the first moving stage 50 and the reference grid 46 for the observation is moved with respect to a support plate 63 to make the projection grid 40 move integrally and the reference grid 46 for the observation, with respect to the optical axis. COPYRIGHT: (C)2005,JPO&NCIPI
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