| 摘要 |
PROBLEM TO BE SOLVED: To provide a film forming apparatus that is capable of forming a uniform film by the combination use of the vacuum film forming method and the coating film forming method under a reduced pressure, and to provide a film forming method to stably form a desired functional film. SOLUTION: The film forming apparatus is provided with at least one of a vacuum film forming chamber with a displacement pump, at least one of coating film forming chamber with a displacement pump and a conveying mechanism to carry the film to be formed between the vacuum film forming chamber and the coating film forming chamber under reduced-pressure conditions. The film forming method comprises conducting the multi-layered film forming method comprising the vacuum film forming method and the coating film forming method under reduced-pressure conditions by placing the film to be formed for a period from the initiation to the completion of the film formation under reduced pressure conditions. COPYRIGHT: (C)2005,JPO&NCIPI
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