摘要 |
PROBLEM TO BE SOLVED: To suppress heat distortion of a diaphragm in a thermoelement having: the diaphragm; a thermoelectric semiconductor crystal fixed in a state in which it penetrates the diaphragm; and electrodes connected to both end faces of the thermoelectric semiconductor crystal. SOLUTION: The thermoelement 1 is provided with the diaphragm 2, the thermoelectric semiconductor crystal 3 fixed to the diaphragm 1 in the state that it penetrates the diaphragm 2, the upper electrode 4 bonded to an upper end of the thermoelectric semiconductor crystal 3 by solder, and a lower electrode 5 bonded to a lower end of the thermoelectric semiconductor crystal 3 by solder. A notch 21 is made near an edge of the diaphragm 2. Since elasticity of the diaphragm 2 is absorbed by the notch 21, heat distortion of the diaphragm 1 is suppressed. Thus, damage of the thermoelectric semiconductor crystal 3 and peeling of the electrodes 4 and 5 are prevented, and therefore life of the thermoelement 1 is prolonged. COPYRIGHT: (C)2005,JPO&NCIPI |