发明名称 |
Capping unit and control method for same, liquid droplet ejection apparatus and device manufacturing method |
摘要 |
A capping apparatus including: a sealing unit that seals at least nozzle apertures of a liquid droplet ejection head that ejects liquid droplets; a heating unit that heats at least a vicinity of the nozzle apertures; and a negative pressure supplying unit that supplies an interior of the sealing unit with negative pressure that causes liquid droplets to be ejected from the nozzle apertures.
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申请公布号 |
US2005140718(A1) |
申请公布日期 |
2005.06.30 |
申请号 |
US20040005028 |
申请日期 |
2004.12.07 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
USUDA HIDENORI |
分类号 |
B41J2/18;B05C5/00;B05C11/10;B05D1/26;B05D3/00;B41J2/165;B41J2/175;B41J2/185;(IPC1-7):B41J2/165 |
主分类号 |
B41J2/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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