| 摘要 |
PROBLEM TO BE SOLVED: To surely scan closed defects of a specimen, and to determine the existence of advancing properties of the defects. SOLUTION: A non-destructive inspection apparatus is provided with a defect scanning means 20 for scanning the internal defects of the specimen 3 and a defect width changing means 10 for applying a predetermined action to the specimen 3, and forcibly changing the width of the closed internal defects to be within predetermined dimensions, and scans the defects. COPYRIGHT: (C)2005,JPO&NCIPI
|
