| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical characteristic evaluation device capable of making constant an incident angle of a beam from a light source into an imaging device all the time, capable of eliminating dispersion in an evaluation result, and capable of realizing satisfactory evaluation reproducibility. SOLUTION: This optical characteristic evaluation device is provided with the light source 1, an optical system for condensing the emission beam from the light source 1 by a condenser lens 2 to be emitted to the imaging device 3, a drive unit 4 for driving the imaging device 3, a signal processor 5 for processing an output signal from the imaging device 3, a laser emitter 6 located on an optical axis of the beam emitted from the light source 1 to the imaging device 3, and installed between the light source 1 and the condenser lens 2 to emit the laser beam along a condenser lens 2 direction, an optical axis deviation detector 7 for detecting a displacement with respect to the optical axis from a photoreceived position of a laser reflected beam reflected by the imaging device 3 after the laser beam passes the condenser lens 2, and an attaching regulator 8 for detaching the imaging device 3 to regulate an attaching position and a gate. COPYRIGHT: (C)2005,JPO&NCIPI
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