发明名称 Auto-diagnostic method and apparatus
摘要 Methods for automated calibration and diagnostics of a workpiece transfer system are provided. In one embodiment, a method for locating an end effector includes retrieving a workpiece located at a target location, passing the workpiece through a plurality of sensors, wherein at least one of the sensors changes state in response to a position of at least one of the end effector or workpiece, recording a metric of robot position associated with the sensor change of state, determining an error for an expected metric of the end effector position from the recorded robot position metric and correcting a taught location of the robot for the target position. In another embodiment, a process for monitoring a robotic transfer system is provided that includes detecting a first positional error in a robotic transfer system, and comparing the first positional error to a second positional error in the robotic transfer system.
申请公布号 US2005137751(A1) 申请公布日期 2005.06.23
申请号 US20040002732 申请日期 2004.12.02
申请人 COX DAMON K.;FREEMAN MARVIN L. 发明人 COX DAMON K.;FREEMAN MARVIN L.
分类号 H01L21/68;B25J9/16;G06F19/00;H01L21/00;H01L21/66;(IPC1-7):G06F19/00 主分类号 H01L21/68
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