摘要 |
The purpose of the invention is to provide an organic electroluminescent element having stable luminescent characteristics with a low luminescence starting voltage and without non-luminescing black spots in the luminescing surface. The invention relates to a method of manufacturing an organic electroluminescent element and an organic electroluminescent element produced by said method, said method of manufacturing an organic electroluminescent element comprising a process for forming a positive electrode substrate by dry etching a transparent electrode in a vacuum, a process for dry washing said positive electrode substrate in a continuous vacuum without exposure to air, a process for forming an organic layer incorporating an organic luminescing layer on said positive electrode substrate, and a process for forming a negative electrode on said organic layer.
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