发明名称 MANUFACTURING METHOD OF PRINTED WIRING SUBSTRATE AND HEAT TREATMENT DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a printed wiring substrate which can reduce the sedimentation of filler constituents in a curing process of sealing resin, and a heat treatment device. <P>SOLUTION: Heat treatment is carried out while rotating a substrate 11 having a sealer 15 comprising a filler 17 and a liquid resin material 16, and a semiconductor chip 13 arranged on the sealer 15 on the major surface thereof. The sedimentation of the filler 17 in the sealer 15 can be restrained by rotating the substrate 11 in heat treatment, thus dispersing the filler 17 uniformly. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005159161(A) 申请公布日期 2005.06.16
申请号 JP20030398072 申请日期 2003.11.27
申请人 TOSHIBA CORP 发明人 HIRAMOTO SHUJI;MURAKAMI IKKO
分类号 H01L21/60;H01L21/56;(IPC1-7):H01L21/56 主分类号 H01L21/60
代理机构 代理人
主权项
地址