| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for surer detection of a wafer in a cassette at high speed, and to provide a prober device. SOLUTION: The provider device 10 is provided with sensors 61 and 62 for detecting the existence of the wafer in the cassette, a driving means 54 which relatively moves the cassette 22 and the sensors in one direction, a pulse signal output part 55 for outputting a pulse signal synchronized with a moving distance by the driving means 54, a read timing generator 72 for outputting a reading timing signal when the pulse signal from the pulse signal output 55 is inputted for the prescribed number of times, a read part 71 for reading the output of the sensor, when the reading timing signal from the read timing generator 72 is inputted, and a wafer existence deciding part 83 for deciding the presence or the absence of the wafer in the cassette, based on the detection result of the sensor. COPYRIGHT: (C)2005,JPO&NCIPI
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