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发明名称
摘要
申请公布号
JP3659406(B2)
申请公布日期
2005.06.15
申请号
JP20010173026
申请日期
2001.06.07
申请人
发明人
分类号
H01L21/60;(IPC1-7):H01L21/60
主分类号
H01L21/60
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代理人
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