发明名称 Pre-fabrication scribing
摘要 Singulating a wafer into individual die using a pre-scribing technique. Embodiments of the invention relate to scribing a wafer prior to the fabrication process in order to help preserve the integrity of the fabricated devices during singulation.
申请公布号 US2005124140(A1) 申请公布日期 2005.06.09
申请号 US20030729176 申请日期 2003.12.04
申请人 MULLIGAN ROSE 发明人 MULLIGAN ROSE
分类号 H01L21/78;(IPC1-7):H01L21/44;H01L21/301 主分类号 H01L21/78
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