| 摘要 |
PROBLEM TO BE SOLVED: To extract an adjacent vector so that trapping processing can be surely performed on a necessary position even when there is a fine gap due to small overlap or the like between two objects. SOLUTION: When a noticed object P7 and a related pattern P6 which is a lower side object adjacent to the noticed object P7 come into contact with each other at two points A, B and a gap area Rg is formed between the noticed object P7 and the related pattern P6, an adjacent vector for specifying a position where a trap pattern may be generated is extracted as follows. First an intersection vector corresponding to a route touching the gap area Rg out of a route from the point A up to the point B on the contour line of the noticed object P7 is found out. Then a length L (length of a segment CD) from the middle point C of the intersection vector up to the related pattern P6 is calculated and whether the length L is equal to or below a prescribed valueε(e.g. an interval corresponding to one or two pixels) or not is judged. When the length L is≤ε, the intersection vector is determined as the adjacent vector. COPYRIGHT: (C)2005,JPO&NCIPI
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