METAL VAPORIZING HEATING ELEMENT AND METAL VAPORIZING METHOD

摘要

A metal vaporizing boat capable of improving wettability to molten metal to attain a long service life, and a metal vaporizing method using it. A metal vaporizing heating element characterized by comprising one or two or more grooves formed, in a direction not parallel to a conduction direction, in the upper surface of a ceramic sintered body containing titanium diboride (TiB2) and/or zirconium diboride (ZrB2) and boron nitride (BN). It is preferable, in this case, that a direction not parallel to a conduction direction crosses a conduction direction at 20-160°, the ceramic sintered body has a cavity in the bottom surface of which grooves are formed, and desired patterns are drawn on the upper surface of the ceramic sintered body and/or the upper surface of the cavity by a plurality of grooves. In addition, a metal vaporizing method characterized by heating this metal vaporizing heating element in vacuum with part or all of its grooves kept in contact with metal.