| 摘要 |
<P>PROBLEM TO BE SOLVED: To overcome the problem wherein an implementation substrate inspecting apparatus for comparatively image-processing the whole substrate using a uniform image processing algorithm does not attain speed for the recent highest-speed manufacturing line, despite there being an advantage of eliminating the need for creating an instruction program and facilitating high-speed operation. <P>SOLUTION: In the implementation substrate inspecting apparatus for comparatively inspecting the whole substrate surface using the uniform image processing algorithm, the inspection speed is achieved and fully copes with the speed of the highest-speed manufacturing line, since an automatically inspected area is limited from the visible image as a whole to a substrate area or a component implementing area. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
