DRY ETCH PROCESS,申请号KR20030084138-传众专利搜索

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发明名称	DRY ETCH PROCESS
摘要
申请公布号	KR20050050410(A)	申请公布日期	2005.05.31
申请号	KR20030084138	申请日期	2003.11.25
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	BAEK, MI JONG;YOU, JUN YEOUL
分类号	(IPC1-7):H01L21/306	主分类号	(IPC1-7):H01L21/306
代理机构		代理人
主权项
地址

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