Scribe seal providing enhanced substrate noise isolation

摘要

Multiple scribe seals are provided around an integrated circuit on a die to attain enhanced substrate noise isolation. In one embodiment, an inner scribe seal prevents mobile ions from entering the integrated circuit, and an outer scribe seal provides mechanical strength to the die. In addition, both the inner scribe seal and the outer scribe seal are designed to offer high resistance path to substrate noise. Due to the high resistance, the noise that would be coupled to various portions of the integrated circuit may be reduced.