| 摘要 |
PROBLEM TO BE SOLVED: To provide a method capable of measuring the liquid-filled level or the surface level of liquid filled inside a recess, even if its opening is submillimeter width, and to output an accurate value of the level of surface. SOLUTION: By nearly parallel traverse of a sensor receiving light emission, which outputs a length corresponding value d and the light intensity I, both of which are obtained from the correspondence between colors due to the chromatic aberrations of light reflected from the measured parts and their focal lengths, along a prescribed measuring path set along the inlet surface of the recess, a characteristic curve 12 representing the variation of length corresponding value from the surface of the liquid and a characteristic curve 11 representing the variations of the light intensity are provided, and then the liquid-filled level is decided, based on the length corresponding value to the liquid surface, obtained by combining both the characteristic curves 12 and 11. COPYRIGHT: (C)2005,JPO&NCIPI |
