发明名称 DEVICE PACKAGE, AND MANUFACTURING METHOD OF THE SAME AND TESTING METHOD THEREFOR
摘要 <P>PROBLEM TO BE SOLVED: To provide a small-sized micro-optical device package for communication with airtightness at a low cost. <P>SOLUTION: In the micro-optical device package 500, optical devices 12, 18, 22 and 32 are disposed on a micro-optical bench 100 where a surface processing area is formed such as grooves where the optoelectronic devices 12, 18, lenses 22, 32, a fiber 42 and a lid 200 are disposed, and thereafter the lid 200 having a sidewall 220 which light penetrates is disposed on the optical micro-bench 100 by keeping airtightness. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005136384(A) 申请公布日期 2005.05.26
申请号 JP20040267167 申请日期 2004.09.14
申请人 ROHM & HAAS ELECTRONIC MATERIALS LLC 发明人 SHERRER DAVID W;RASNAKE LARRY J;FISHER JOHN J
分类号 H01L23/02;G01R31/26;G02B6/36;G02B6/42;H01L21/28;H01L21/66;H01L23/48;H01L29/22;H01L33/00;H01S5/00;H01S5/022;H01S5/024 主分类号 H01L23/02
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