| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection system capable of X-ray inspection in an optimum state for detecting defects etc. of objects to be inspected regardless of the shape of the defects etc. or the position and orientation of the objects to be measured. SOLUTION: A table is moved across a plane of an X-ray beam formed between an X-ray source and a line sensor opposed to the X-ray source to inspect an object to be inspected mounted onto the table in the X-ray inspection system. The table is provided in such a way as to be inclined on an axis which intersects with the plane of the X-ray beam. COPYRIGHT: (C)2005,JPO&NCIPI
|
