发明名称 Gas circulation fan for excimer laser apparatus
摘要 In a gas circulation fan, a main shaft is supported in a non-contact manner, by magnetic bearings. Between each of the magnetic bearings and a controller, a relay is provided. Each relay includes a position detection sensor circuit, an offset adjuster, a feedback gain adjuster and a filter circuit. Thus, compatibility between a mechanical body unit and the controller is attained.
申请公布号 US6898229(B2) 申请公布日期 2005.05.24
申请号 US20020222999 申请日期 2002.08.19
申请人 NTN CORPORATION 发明人 YADA YUUJI
分类号 F04D29/056;F04D29/00;F04D29/04;F04D29/05;F04D29/058;F16C32/04;F16C39/06;H01S3/036;H01S3/225;(IPC1-7):H01S2/22 主分类号 F04D29/056
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