LIQUID JET HEAD, LIQUID JET DEVICE, AND METHOD OF MANUFACTURING LIQUID JET HEAD

摘要

PROBLEM TO BE SOLVED: To prevent deterioration of a heating element even when occurrence of a step is avoided by an SOG film in relation to a liquid jet head, a liquid jet device and a method of manufacturing the liquid jet head, particularly, a thermal type inkjet printer in which a heating element and a transistor for driving the heating element are integrally formed on a substrate. SOLUTION: A process of depositing a coating type insulation material film and a process of removing the insulation material film in a region for forming the heating element by etching are repeated two or more times. COPYRIGHT: (C)2005,JPO&NCIPI