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发明名称
Verfahren zur chemischen Behandlung von Halbleiterscheiben
摘要
申请公布号
DE50105889(D1)
申请公布日期
2005.05.19
申请号
DE20015005889
申请日期
2001.06.28
申请人
SILTRONIC AG
发明人
BRUNNER, ROLAND
分类号
B08B3/08;H01L21/306;(IPC1-7):H01L21/306
主分类号
B08B3/08
代理机构
代理人
主权项
地址
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