RADIAL POWER MEGASONIC TRANSDUCER

摘要

A transducer (90) comprising an acoustic energy generating means (24) and a resonator (14). The acoustic energy generating means generates acoustic energy in the frequency range of 0.4 to 2.0 MHz, and is adapted for delivering an approximately uniform amount of acoustic energy to each unit of surface area on a substrate (103) in a given time period when the substrate (103) is rotating. The acoustic energy generating means (24) has a surface area that is less than the surface area of the substrate (103),and may comprise a wedge shaped piezoelectric crystal (24). A resonator (14) is attached to the acoustic energy generating means (24) for transmitting the acoustic energy to the substrate (103).