SPECIMEN OBSERVATION METHOD AND MICROSCOPE, AND, FOR USE THEREIN, SOLID IMMERSION LENS AND OPTICAL CONTACT LIQUID

摘要

An optical contact liquid containing amphiphilic molecules is dropped on a semiconductor device as an inspection subject specimen (S104), and a solid immersion lens is disposed thereon (S105). Subsequently, the position of insertion of the solid immersion lens is regulated (S106), and the optical contact liquid is dried (S108) so as to effect optical contact of the solid immersion lens with the semiconductor device. As a result, there can be realized a specimen observation method, microscope, etc. wherein positioning to desired site of a specimen is facilitated and wherein optically secure contact of a solid immersion lens with the specimen can be accomplished.