SEMICONDUCTOR INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent such damages as cracks and crazes even if a high load is added to a semiconductor device at the time of an electric inspection of a semiconductor device. SOLUTION: To contact terminals 14, two or more contact pieces 14b provided with slope sections 14a formed inward with sharply pointed projecting tip shape are arranged upright so as to be opened or closed inside or outside. When contact terminals 14 contact ball electrodes 13 of a semiconductor device 17 at the time of inspection, the contact area to ball electrodes 13 is made to increase by contacting the contact pieces 14b at the pointed tip so as to open along with ball electrodes 13, and obtain the stabilized contact also by a low load. COPYRIGHT: (C)2005,JPO&NCIPI