| 摘要 |
PROBLEM TO BE SOLVED: To provide a micromachine capable of improving reliability and a yield, and drivable in lower electric power consumption, by preventing irreversible deformation in lifting operation of a vibrating part. SOLUTION: This micromachine 10 has support parts 12 erected on both sides of a lower electrode 3 arranged on a base board 2, and the belt-like vibrating part 13 extended via a space part A above the base board 2 from the upper end of the support parts 12 and extended between the support parts 12. A projecting part 15 projecting to at least one of the base board 2 side and the inverse side of this side in the width direction of a belt shape, is arranged in an end part in the vicinity of a joining part with the support parts 12 in the vibrating part 13. Thus, the projecting part 15 is made to act as a spring, to facilitate vibrating operation of the vibrating part 13 for approaching and separating to the lower electrode 3. COPYRIGHT: (C)2005,JPO&NCIPI
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