发明名称 SYNERGETIC SP-SP2-SP3 CARBON MATERIALS AND DEPOSITION METHODS THEREOF
摘要 The present invention generally provides carbon materials and methods for producing the carbon materials that include a polymer-like bonded carbon network, a diamond-like bonded carbon network, a graphene-like bonded carbon network, and at least one stabilizing network of at least one alloying element. The material may further include hydrogen, silicone, and oxygen. The carbon materials are generally produced using plasma deposition while accounting for both thermal and incident particle impact activation for surface reactions, which beneficially enables the production of the carbon material at relevantly low incident flux energy and/or relatively low substrate temperatures.
申请公布号 WO2005043648(A2) 申请公布日期 2005.05.12
申请号 WO2004US34681 申请日期 2004.10.21
申请人 NANODYNAMICS, INC.;DORFMAN, BENJAMIN, F. 发明人 DORFMAN, BENJAMIN, F.
分类号 B01J3/06;B32B7/02;B32B9/00;C23C16/30;C23C16/452;H01L21/42;H01M;H05H1/24 主分类号 B01J3/06
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