SOURCE LIQUID SUPPLY APPARATUS HAVING A CLEANING FUNCTION

摘要

To provide a source liquid supply apparatus that avoids leaving source liquid-and/or cleaning fluid-derived residues in the vicinity of the joint or connection region between the source liquid feed conduit and the source tank. A flow-switching mechanism Vc is attached to the source tank (22) of a source liquid supply apparatus (20). This flow-switching mechanism Vc has a first port (33) that is connected to the discharge port conduit (24) of the source tank (22), a second port (34) that is connected to a feed conduit (16), and a third port (35) that is connected to an exhaust conduit (25). The first port (33) can be closed by a valve member (43) on a diaphragm (42) disposed within a common compartment (38) while communication is maintained between the second and third ports (34) and (35). A cleaning fluid source (55) and a purge gas source (57) are connected to the feed conduit (16). Purge gas and cleaning fluid fed into the feed conduit (16) are discharged from the second and third ports (34) and (35) through the exhaust conduit (25).