发明名称 |
Optical targets |
摘要 |
An optical target is provided. In one embodiment, the target is formed on a substrate. The target includes a first layer deposited below a second layer on the substrate. The second layer is deposited below a third layer on the substrate. The first layer has a topographic contour formed thereon, the first layer at least partially projecting a patterned topographical contour through the second layer to the third layer.
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申请公布号 |
US2005095439(A1) |
申请公布日期 |
2005.05.05 |
申请号 |
US20030697394 |
申请日期 |
2003.10.30 |
申请人 |
DODD SIMON;MILLER MICHAEL D.;TORGERSON JOSEPH M. |
发明人 |
DODD SIMON;MILLER MICHAEL D.;TORGERSON JOSEPH M. |
分类号 |
B32B9/04;B32B13/04;(IPC1-7):B32B9/04 |
主分类号 |
B32B9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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