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发明名称
METHOD OF FORMING METAL PATTERN FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20050038722(A)
申请公布日期
2005.04.29
申请号
KR20030073942
申请日期
2003.10.22
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
OH, JUN HWAN;SON, HONG SEONG
分类号
H01L21/321;H01L21/3213;H01L21/768;(IPC1-7):H01L21/28
主分类号
H01L21/321
代理机构
代理人
主权项
地址
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